JPS6126061B2 - - Google Patents
Info
- Publication number
- JPS6126061B2 JPS6126061B2 JP925881A JP925881A JPS6126061B2 JP S6126061 B2 JPS6126061 B2 JP S6126061B2 JP 925881 A JP925881 A JP 925881A JP 925881 A JP925881 A JP 925881A JP S6126061 B2 JPS6126061 B2 JP S6126061B2
- Authority
- JP
- Japan
- Prior art keywords
- peel
- film
- adhesive
- mask layer
- layout
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001070 adhesive effect Effects 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 claims description 4
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000012945 sealing adhesive Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 34
- 238000000034 method Methods 0.000 description 25
- 239000010410 layer Substances 0.000 description 10
- 239000012790 adhesive layer Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 229920000728 polyester Polymers 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 101100008048 Caenorhabditis elegans cut-4 gene Proteins 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 239000012775 heat-sealing material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 239000001044 red dye Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000012463 white pigment Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP925881A JPS57124351A (en) | 1981-01-23 | 1981-01-23 | Peel-off film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP925881A JPS57124351A (en) | 1981-01-23 | 1981-01-23 | Peel-off film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57124351A JPS57124351A (en) | 1982-08-03 |
| JPS6126061B2 true JPS6126061B2 (en]) | 1986-06-18 |
Family
ID=11715389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP925881A Granted JPS57124351A (en) | 1981-01-23 | 1981-01-23 | Peel-off film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57124351A (en]) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61183651A (ja) * | 1985-02-09 | 1986-08-16 | Dainippon Screen Mfg Co Ltd | 色分解フイルムの作成方法とその装置 |
| JPS61228448A (ja) * | 1985-03-11 | 1986-10-11 | Sanyo Kokusaku Pulp Co Ltd | ピ−ルオフフイルム |
| JP2806529B2 (ja) * | 1988-08-09 | 1998-09-30 | 株式会社きもと | マスキングパターン作成方法 |
| JP2802075B2 (ja) * | 1988-08-18 | 1998-09-21 | 株式会社きもと | マスキングパターン作成方法 |
-
1981
- 1981-01-23 JP JP925881A patent/JPS57124351A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57124351A (en) | 1982-08-03 |
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